3D - Optical Surface Profilometer Laboratory

Specifications

 Max. Scan Range

Up to 10 mm

 RMS Repeatability (PSI)

0.02 nm*

 Lateral Resolution

0.38 μm min (Sparrow criterion);

0.26 μm (with AcuityXR®)

 Step Height Accuracy

< 0.75%**

 Step Height Repeatability

< 0.1% 1 sigma repeatability

 Max Scan Speed

47 μm/sec (with standard camera)

 Sample Reflectivity

0.05% - 100%

 Max. Sample Slope

Up to 40° (shiny surfaces);

Up to 87° (rough surfaces)

 Sample Height

Up to 100 mm (4 in.)

 Sample Weight

Up to 4.5 kg (10 lb)

 XY Sample Stage

150 mm (6 in.) manual or automated option

 Tip/Tilt Function

±6° manual in stage

 Optical Metrology Module

Patented dual-LED illumination;

Single-objective adapter;

Optional automated or manual turret;

Single or auto FOV lenses

 Objectives

Parfocal: 2.5x, 5x, 10x, 20x, 50x, 115x

LWD: 1.5x, 2x, 5x, 10x

TTM: 2x, 5x, 10x, 20x

Brightfield: 2.5x, 5x, 10x, 50x

 Available Zoom Lenses

0.55x, 0.75x, 1x, 1.5x, 2x

 Camera

Standard monochrome: 640 x 480

High-resolution monochrome (option): 1280 x 860

Standard color (option): 640 x 480

High-resolution color (option): 1280 x 860

 Software System

Vision64 Control and Analysis Software on

Windows 7 64-bit OS

 Software Packages

Production interface; Acuity XR; Annular Analysis;

High Speed AF; Optical Analyses; Advanced Image

 XY Automation

 Manual stitching standard;

 Automated stitching, scatter and grid automation   standard with motorized XY stage

 Calibration-          

 Via traceable step standards

 System Footprint  

 450 mm (W) x 534 mm (D) x 632 mm (H)

 System Weight     

 60.3 kg (133 lb)